The aim of “Introduction to Semiconductor Manufacturing Technology” is to acquaint the students with the basic principles of semiconductor manufacturing. The course also introduces the students to the semiconductor materials and equipment, the semiconductor manufacturing and the semiconductor business. Utilizing the knowledgement of commercial semiconductor materials and equipment, the students can understand their roles in the semiconductor fields. The contents include Introduction to IC Fabrication, Semiconductor Basics, Wafer Manufacturing, Thermal Processes, Photolithography, Plasma Basics, Ion Implantation, Etch, CVD and Dielectric Thin Film and Metallization.